WRA series


Top of the line models, with market leading specifications
  • Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes.
  • This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements.

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RGAs do analysis of gases and their composition, this is needed for:

  • Leak detection and identification
  • Find and identify contaminants
  • Verify gas purity
  • Product/process quality assurance
  • Process & equipment diagnostics and control
  • Optimize process performance and yield

The perfect solution in a wide range of applications:

  • Semiconductor processes
  • Thin-film and display
  • Vacuum heat treatment
  • Vacuum freeze drying
  • Research & development
  • High energy physics

Unique benefits

  • Total pressure measurement for full process control
  • Dual filament for highest reliability and up-time
  • On unit display for basic measurements without a PC
  • Customer replaceable parts
  • Degas function
  • Protection of Ion source and EM
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Model

WRA200S, WRA300S

Download Datasheet – WRA Residual Gas Analyser Product Datasheet

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