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HHV Spares & Consumables, PFPE Fluids
Fomblin® SV Inert Vacuum Pump Fluid
Fomblin® PFPE vacuum pump fluids are non-flammable, chemically inert, and thermally stable. When used with proper pump filtration, Fomblin PFPE vacuum pump oils provide exceptionally long service life. These fluids have excellent lubricity properties and are available in viscosity grades suitable for use in all vacuum pumps. Consult your Inland sales representative or engineer for assistance in selecting the proper viscosity grade for your specific pump and application.
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Fomblin SV is an advanced inert perfluorinated fluid with a backstreaming rate of virtually zero, allowing for an ultra clean vacuum. This fluid offers excellent performance in dry etcher and CVD applications without the need to invest in dry pump technology.
Properties
- Low vapor pressure
- Non-flammable
- No flash or fire point
- Low volatility
- Low surface tension
- Low toxicity
- Excellent compatibility with metals, plastics, and elastomers
- Chemically inert
- High thermal stability
- Good aqueous and non-aqueous solvent resistance
- High dielectric properties
- Good radiation stability
- CFC-free and Ozone friendly
- Reclaimable
| Typical property | SV |
|---|---|
| Vapor pressure at 20ºC (torr) | 5×10-9 |
| Viscosity at 20ºC (cSt) | 200 |
| Pour Point (ºC) | -38 |
| Flash Point (ºC) | None |
| Density (g/ml) | 1.90 |
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